4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron microscope type

Hitachi Instruments Engineering Co. Ltd.

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Chromatograph system and method of use

Chemistry: analytical and immunological testing – Including chromatography
Patent

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Electron beam drawing process

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having substrate registration feature
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Electron beam lithography apparatus and a method thereof

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Energy dispersive X-ray analyzer

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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