Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1997-07-24
1999-04-27
Nguyen, Kiet T.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
2504431, H01J 3720
Patent
active
058981772
ABSTRACT:
A method of operating an electron microscope under a high temperature and the electron microscope are provided. The electron microscope can stably set and efficiently heat a sample to observe and measure high temperature physical properties such as phase transformation, phase transition and the like required for development of a heat resistant material. In the method of operating the electron microscope and the electron microscope, a sample to be observed is set so as to position at a central hole of a double spiral flat filament, the detachable heating stage is fixed to the heating holder using screws of a pivot, and the heating stage is tilted by vertical movement of a crank-shaped arm. The heating stage and the arm are insulated from each other by an insulating body, and current from a power source is conducted by a conductor wire to heat the filament.
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Aoyama Takashi
Hidaka Kishio
Hiraga Ryo
Kamino Takeo
Nakamura Shigeyoshi
Hitachi , Ltd.
Hitachi Instruments Engineering Co. Ltd.
Nguyen Kiet T.
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