4. Radiant energy
  5. Ion generation
  6. Field ionization type

Hisato Tanaka

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Ion implantation system using optimum magnetic field for concent

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Ion source device

Radiant energy – Ion generation – Field ionization type
Patent

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Method of automatically resetting processing apparatus

Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
Reexamination Certificate

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Method of maintaining and automatically inspecting...

Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
Reexamination Certificate

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Profile ID: LFUS-PAI-P-666065

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