Radiant energy – Ion generation – Field ionization type
Patent
1993-01-22
1994-03-22
Berman, Jack I.
Radiant energy
Ion generation
Field ionization type
250427, 31511181, 313230, 3133621, H01J 302
Patent
active
052967131
ABSTRACT:
An ion source device includes an electron generating chamber detachably combined with an electron attraction electrode and an ion generating chamber through insulating members. Hooks are projected from both sides of the electron generating chamber. A holder plate is arranged under the ion generating chamber with an insulating member interposed between them. A fixing member is arranged under the holder plate. The fixing member includes a pusher supported by coned disc springs and this pusher of the fixing member is fitted into a recess on the underside of the holder plate and struck against the top of the recess. A pair of holder members are arranged along both sides of the device. The holder members are detachably engaged with the hooks of the electron generating chamber at the upper portion thereof and also detachably engaged with the fixing member at the lower portion thereof. The components ranging from the electron generating chamber to the holder plate are held and fixed between the hooks of the electron generating chamber and the pusher of the fixing member through the holder members.
REFERENCES:
patent: 5028791 (1991-07-01), Koshiishi et al.
patent: 5049784 (1991-09-01), Matsudo
patent: 5083061 (1992-01-01), Koshiishi et al.
patent: 5089747 (1992-02-01), Koshiishi et al.
patent: 5097179 (1992-03-01), Takayama
patent: 5101110 (1992-03-01), Matsudo et al.
Berman Jack I.
Tokyo Electron Limited
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