Method of automatically resetting processing apparatus

Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation

Reexamination Certificate

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Details

C714S724000

Reexamination Certificate

active

06954716

ABSTRACT:
According to the present invention, as processing apparatus drive starts, the operating state of software used to drive the processing apparatus is monitored in real time to diagnose whether or not an abnormality has occurred (S110). If it is judged through the diagnosis performed in S110that no abnormality has occurred, the workpiece processing is allowed to continue uninterrupted and then a decision is made as to whether or not the workpiece processing has been completed (S130). If the processing has been completed, the processing apparatus is stopped (S140). If, on the other hand, it is judged through the diagnosis performed in S110that an abnormality has occurred, a log of the diagnosis item with regard to which the abnormality has occurred is recorded (S120). The processing apparatus is then stopped (S140).

REFERENCES:
patent: 4618938 (1986-10-01), Sandland et al.
patent: 5859698 (1999-01-01), Chau et al.
patent: 09-129554 (1997-05-01), None
patent: 11-016798 (1999-01-01), None
patent: 11-204390 (1999-07-01), None
patent: 11-238659 (1999-08-01), None
patent: 11-243041 (1999-09-01), None

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