4. Metal working
  5. Barrier layer or semiconductor device making

Hiroyuki Kitsunai

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Disturbance-free, recipe-controlled plasma processing method

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Disturbance-free, recipe-controlled plasma processing system...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
Reexamination Certificate

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Disturbance-free, recipe-controlled plasma processing system...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
Reexamination Certificate

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Holder device and semiconductor producing apparatus having same

Metal working – Barrier layer or semiconductor device making
Patent

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Magnetic liquid seal with magnetized deformable magnet

Seal for a joint or juncture – Seal between relatively movable parts – Relatively rotatable radially extending sealing face member
Patent

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Profile ID: LFUS-PAI-P-1655983

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