Electron microscope

Details Electron microscope Electron microscope

1995-09-26

1997-07-22

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

H01J 3726

Patent

active

056506210

ABSTRACT:
The composition change and strained structure in a heterointerface or thin film of a multilayer thin film specimen are observed. When the composition change and strained structure are observed, comparison between a dark-field image and a bright-field image and comparison between two dark-field images are required. The position of an objective aperture disposed between the specimen and a detector is moved rapidly so that diffracted wave or transmitted wave corresponding to the dark-field image or bright-field image of a desired plane index is transmitted. As a result, the dark-field image or bright-field image of a desired plane index can be observed correspondingly to the position of the objective aperture.

REFERENCES:
patent: 3833811 (1974-09-01), Koike et al.
patent: 4146788 (1979-03-01), Mirkin et al.
patent: 4945237 (1990-07-01), Shii et al.
patent: 5453617 (1995-09-01), Tsuneta et al.
Japanese Journal of Applied Physics, vol. 26, No. 5, May 1987, Kakibayashi et al, pp. 770-771.
Japanese Journal of Applied Physics, vol. 30, No. 1A, Jan. 1991, Kakibayashi et al, pp. L52-L55.
Japanese Journal of Applied Physics, vol. 25, No. 11, Nov. 1986, pp. 1644-1649.
Japanese Journal of Applied Physics, vol. 30, No. 6A, Jun. 1991, pp. L959-L962.

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