4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Forming from vapor or gaseous state
  6. With decomposition of a precursor

Hironori Matsunaga

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Ferroelectric thin film coated substrate, producing method there

Compositions – Fluent dielectric – N-containing
Patent

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Ferroelectric thin film coated substrate, producing method...

Stock material or miscellaneous articles – Composite – Of inorganic material
Reexamination Certificate

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Ferroelectric thin film with intermediate buffer layer

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent

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Ferroelectric thin film, ferroelectric thin film covering substr

Stock material or miscellaneous articles – Web or sheet containing structurally defined element or... – Including a second component containing structurally defined...
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Ferroelectric thin film, manufacturing method thereof and...

Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Reexamination Certificate

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