Stock material or miscellaneous articles – Web or sheet containing structurally defined element or... – Including a second component containing structurally defined...
Patent
1995-05-24
1998-09-22
Speer, Timothy
Stock material or miscellaneous articles
Web or sheet containing structurally defined element or...
Including a second component containing structurally defined...
428446, 428697, 428699, 428700, 428701, 428702, 428325, B32B 1700
Patent
active
058111816
ABSTRACT:
A close a-axis orientating film having a smooth surface and excellent ferroelectric characteristics is manufactured at a low temperature with preferable reproducibility to apply ferroelectric Bi.sub.4 Ti.sub.3 O.sub.12 to development of various kinds of devices such as a ferroelectric non-volatile memory, a pyroelectric sensor, etc. A ferroelectric Bi.sub.4 Ti.sub.3 O.sub.12 thin film is formed on a substrate through a titanium oxide buffer layer so that closeness and surface smoothness of the Bi.sub.4 Ti.sub.3 O.sub.12 thin film manufactured on the titanium oxide buffer layer can be improved.
REFERENCES:
patent: 5423285 (1995-06-01), Paz de Araujo
Si et al., "Ferroelectric bismuth titanate . . . vapor deposition", Journal of Applied Physics, vol. 73, No. 11, Jun. 1, 1993, pp. 7910-7913.
Mihara et al., "Feasibility for memory . . . fatigue free capacitors", pp. 137-157.
Katayama et al., "Effects of Growth Rate . . . Chemical Vapor Deposition", Japanese Journal of Applied Physics, vol. 32 (1993) pp. 5062-5066 Part 1, No. 11A, Nov. 1993.
Sakashita et al., "Dependence of electrical . . . chemical vapor deposition", Journal of Applied Physics, vol. 73, No. 11, Jun. 1, 1993, pp. 7857-7863.
Kijima Takeshi
Koba Masayoshi
Matsunaga Hironori
Ohtani Noboru
Satoh Sakiko
Sharp Kabushiki Kaisha
Speer Timothy
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