4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Hidenori Miyoshi

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Film formation method and apparatus

Coating processes – Heat decomposition of applied coating or base material – Coating decomposed to form metal
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Material and method for forming low-dielectric-constant film

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Semiconductor device manufacturing method and target...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2380147

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