Film formation method and apparatus

Details Film formation method and apparatus Film formation method and apparatus

2007-05-11

2011-10-04

Cleveland, Michael (Department: 1712)

Coating processes

Heat decomposition of applied coating or base material

Coating decomposed to form metal

Reexamination Certificate

active

08029856

ABSTRACT:
A film formation method is arranged to react carboxylic acid with an oxygen-containing metal compound to produce carboxylate salt gas of a metal of the metal compound. The method then supplies the carboxylate salt gas of the metal onto a substrate. The method applies energy to the substrate to decompose the carboxylate salt of the metal supplied onto the substrate, thereby forming a metal film.

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