Cleaning and liquid contact with solids
Processes
Including application of electrical radiant or wave energy...
Inventor
active
Apparatus and method for real-time measurement of thin film laye
Chemical vapor deposition of fluorocarbon polymer thin films
Chemical vapor deposition of fluorocarbon polymer thin films
Chemical vapor deposition of fluorocarbon polymer thin films
HF vapor phase wafer cleaning and oxide etching
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Profile ID: LFUS-PAI-P-169601