4. Optics: measuring and testing
  5. By configuration comparison
  6. With photosensitive film or plate

Henry K. Chau

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CMP variable angle in situ sensor

Optics: measuring and testing – By configuration comparison – With photosensitive film or plate
Patent

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Method and apparatus for macro defect detection using scattered

Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent

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Thin film detection method and apparatus

Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Patent

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Wafer inspection method and apparatus using diffracted light

Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent

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Profile ID: LFUS-PAI-P-1077367

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