Method and apparatus for macro defect detection using scattered

Details Method and apparatus for macro defect detection using scattered Method and apparatus for macro defect detection using scattered

1997-05-07

1999-01-12

Pham, Hoa Q.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

382149, 382218, G01N 2100, C06K 900

Patent

active

058596984

ABSTRACT:
Macro defects in a processed or partly processed semiconductor wafer, liquid crystal display element, disk drive element or the like, are detected using scattered light. By use of automated image processing techniques, a reference image and a sample image are formed from the scattered light and edge enhanced. A difference image is formed by comparing the edge enhanced reference and sample images. The difference image is evaluated using one or more automated image processing techniques such as thresholding, morphological transformations and blob analysis to identify macro defects.

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