4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Heeyeop Chae

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Capacitively coupled plasma reactor with magnetic plasma...

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Capacitively coupled plasma reactor with magnetic plasma...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Endpoint detection device for realizing real-time control of...

Optics: measuring and testing – With plural diverse test or art
Reexamination Certificate

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Selective etching of carbon-doped low-k dielectrics

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2201981

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