4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Harry P. Gillis

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Apparatus and method for reducing operating voltage in gas disch

Electric lamp and discharge devices – With gas or vapor – Having particular electrode structure
Patent

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Method and apparatus for low energy electron enhanced etching an

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Method and apparatus for low energy electron enhanced etching of

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Method and apparatus for low energy electron enhanced etching of

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Method and apparatus for low energy electron enhanced...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
Reexamination Certificate

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