4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Harm-Jan Voorma

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Illumination system, lithographic apparatus, mirror, method...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Lithographic apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – Focus or magnification control
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Lithographic apparatus, device manufacturing method and...

Radiant energy – Fluent material containment – support or transfer means
Reexamination Certificate

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Lithographic apparatus, device manufacturing method and...

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Lithographic apparatus, device manufacturing method, and...

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2282794

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