Radiant energy – Fluent material containment – support or transfer means
Reexamination Certificate
2006-06-20
2008-12-30
Wells, Nikita (Department: 2881)
Radiant energy
Fluent material containment, support or transfer means
C250S429000, C250S435000, C250S493100, C250S492100
Reexamination Certificate
active
07470916
ABSTRACT:
A collector is disclosed that is constructed to receive radiation from a radiation source and to transmit radiation to an illumination system, the collector comprising a reflective element which is internally provided with a fluid channel.
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Box Wilhelmus Josephus
Frijns Olav Waldemar Vladimir
Limpens Maurice Piërre Marie Arthur
Voorma Harm-Jan
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Wells Nikita
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