Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2006-08-29
2006-08-29
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S055000, C355S067000
Reexamination Certificate
active
07098994
ABSTRACT:
A lithographic apparatus includes an illumination system for providing a beam of radiation, a support structure for supporting a patterning device, the patterning device serving to impart the beam with a pattern in its cross-section. The apparatus further includes a substrate table for holding a substrate, a projection system for projecting the patterned beam onto a target portion of the substrate, and a collector which is arranged for transmitting radiation, received from a first radiation source, to the illumination system. The apparatus includes at least a heater for heating the collector when the collector receives substantially no radiation from the first radiation source. Further aspects of the invention relate to a device manufacturing method as well as a device manufactured thereby.
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Franken Johannes Christiaan Leonardus
Mickan Uwe
Moors Johannes Hubertus Josephina
Voorma Harm-Jan
ASML Netherlands B.V.
Kim Peter B.
Pillsbury Winthrop Shaw & Pittman LLP
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