4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Hagay Cafri

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Apparatus and method for directing gas towards a specimen

Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate

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Chamber elements defining a movable internal chamber

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Vibration damper with nested turbo molecular pump

Pumps – Motor driven – Resiliently mounted pump or motor
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Profile ID: LFUS-PAI-P-2816092

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