Apparatus and method for directing gas towards a specimen

Details Apparatus and method for directing gas towards a specimen Apparatus and method for directing gas towards a specimen

2006-01-31

2006-01-31

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S306000, C250S309000, C250S492210

Reexamination Certificate

active

06992288

ABSTRACT:
The invention provides an apparatus and a method for directing gas towards a specimen, said apparatus includes: (i) means for directing a beam of charged particles towards the specimen; and (ii) a gas conduit providing gas to an area of incidence of said beam of charged particles onto said specimen. The gas conduit includes an intermediate portion having a first end for receiving the inert gas and a substantially sealed second end. The intermediate portion has a first and second apertures that are positioned such as to define a space through which the beam of charged particles can propagate. The intermediate portion is shaped such as to allow a first portion of the inert gas to exit the second aperture and to allow a second portion of the gas to propagate towards the second end and to be returned through the second aperture.

REFERENCES:
patent: 5270552 (1993-12-01), Ohnishi et al.
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patent: 5851413 (1998-12-01), Casella et al.
patent: 6770867 (2004-08-01), Lezec et al.
patent: 6838380 (2005-01-01), Bassom et al.
patent: 2002/0102861 (2002-08-01), Bassom et al.
patent: 2005/0103746 (2005-05-01), Nadeau et al.

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