Vibration damper with nested turbo molecular pump

Pumps – Motor driven – Resiliently mounted pump or motor

Reexamination Certificate

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C417S423400, C417S423140, C417S423150, C062S055500

Reexamination Certificate

active

10622276

ABSTRACT:
A gas turbo pump assembly for connection to a port of a vacuum chamber and having high throughput with low vibration. The assembly comprises a turbo pump and a vibration damper. The pump has a pump body with an external surface and a center axis defining a first axial end and a second axial end of the pump. The pump also has a pump inlet port, the inlet port being coupled to the vacuum chamber port disposed at the first axial end of the pump, and an exit port disposed proximate the second axial end of the pump. The assembly vibration damper is structured to enclose a substantial portion of the pump in a nested arrangement.

REFERENCES:
patent: 4352643 (1982-10-01), Iijima
patent: 4363217 (1982-12-01), Venuti
patent: 4526015 (1985-07-01), Laskaris
patent: 4806075 (1989-02-01), Osterstrom et al.
patent: 4835972 (1989-06-01), Tugal et al.
patent: 6120606 (2000-09-01), Peng
patent: 6575713 (2003-06-01), Ohtachi et al.
patent: 6619911 (2003-09-01), Englander et al.
patent: 6867521 (2005-03-01), Beyer et al.
patent: 6899529 (2005-05-01), Ishikawa et al.
patent: 2001/0012488 (2001-08-01), Ohtachi et al.
patent: 2002/0109090 (2002-08-01), Nakasuji et al.

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