4. Coating apparatus
  5. Work holders, or handling devices

H. Alexander Anderson

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Clustered photolithography system

Coating apparatus – Work holders – or handling devices
Patent

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Linear pad conditioning apparatus

Abrading – Accessory – Dressing
Patent

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Local store for a wafer processing station

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Method of processing a substrate in a photolithography system ut

Radiation imagery chemistry: process – composition – or product th – Post imaging processing
Patent

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Modular wafer polishing apparatus and method

Abrading – Machine – Rotary tool
Patent

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Profile ID: LFUS-PAI-P-854060

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