4. Abrading
  5. Machine
  6. Rotary tool

Gregory C. Lee

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Composite polishing pad for chemical-mechanical polishing

Abrading – Flexible-member tool – per se – Laminate
Reexamination Certificate

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Conditioner assembly and a conditioner back support for a...

Abrading – Machine – Combined
Reexamination Certificate

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Conditioner assembly for a chemical mechanical polishing apparat

Abrading – Abrading process – With tool treating or forming
Patent

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Method and apparatus of a variable height and controlled...

Abrading – Precision device or process - or with condition responsive... – With feeding of tool or work holder
Reexamination Certificate

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Polishing head for a chemical mechanical polishing apparatus

Abrading – Machine – Rotary tool
Patent

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Profile ID: LFUS-PAI-P-384324

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