Abrading – Machine – Rotary tool
Patent
1998-07-15
2000-12-12
Hail, III, Joseph J.
Abrading
Machine
Rotary tool
B24B 722
Patent
active
061590835
ABSTRACT:
A polishing head for a chemical mechanical polishing (CMP) apparatus. The polishing head includes a backplate, a retaining ring supported by the backplate, and a bladder member encircled by the retaining ring. The backplate of the polishing head comprises a driving plate biasedly coupled to a subcarrier by a bellows. The polishing head may further include a lift plate disposed on the subcarrier and beneath the bladder member. A method for polishing a substrate includes placing a substrate on the bladder member and positioning the substrate against a polishing pad such that the bladder member applies a selected pressure profile on the substrate.
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Appel Gregory A.
Chang Shou-sung
Lee Gregory C.
Regan Charles J.
Weldon David E.
Aplex Inc.
Cooke Dermott J.
Hail III Joseph J.
Millers David T.
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