4. Abrading
  5. Machine
  6. Rotary tool

Gregory A. Appel

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Polishing head for a chemical mechanical polishing apparatus

Abrading – Machine – Rotary tool
Patent

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Temperature regulation in a CMP process

Abrading – Precision device or process - or with condition responsive... – Controlling temperature
Patent

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Wafer carrier head with inflatable bladder and attack angle cont

Abrading – Precision device or process - or with condition responsive... – With indicating
Patent

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Wafer polishing head drive

Abrading – Work holder – Clamp
Patent

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Profile ID: LFUS-PAI-P-384322

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