Abrading – Work holder – Clamp
Patent
1997-11-05
2000-05-16
Eley, Timothy V.
Abrading
Work holder
Clamp
451279, 451285, 451286, 451287, 451288, 451289, 451290, 451307, 451334, 451339, 451387, 451393, 451394, 451398, 451405, B24B 4106
Patent
active
060629614
ABSTRACT:
A wafer polisher head drive includes a head drive housing; a head portion extending from the housing for mounting an unpolished wafer when the head drive housing and head portion are in a horizontal orientation; a pivot mechanism extending from the head drive housing for pivoting the head drive housing and the head portion from the horizontal orientation to a vertical orientation juxtaposed to a transverse vertical portion of a continuous rotating polishing belt; a drive in the housing for moving the head portion and a mounted wafer outwardly from the housing against the transverse vertical portion of the rotating polishing belt; and a drive in the housing for rotating the head portion and the mounted wafer. The head drive housing may be pivoted from the vertical orientation in a sweeping arc extending perpendicularly from the belt transverse vertical portion or in a swinging arc extending parallel from the belt transverse vertical portion. The pivot mechanism includes a hollow shaft connected to said head drive housing; and a motor, gearbox and a ball screw and nut assembly in driving connection between the gearbox and the hollow shaft for transversing in a direction parallel to the belt.
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Appel Gregory A.
Can Linh X.
Lum Kelvin
Aplex Inc.
Eley Timothy V.
Kwok Edward C.
Saxon Roberta P.
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