4. Optics: measuring and testing
  5. By dispersed light spectroscopy
  6. Utilizing a spectrometer

Gregg M. Gallatin

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Extending the range of lithographic simulation integrals

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
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Fast and accurate optical proximity correction engine for...

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
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Fast model-based optical proximity correction

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Illumination system with spatially controllable partial...

Photocopying – Projection printing and copying cameras – Step and repeat
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Illumination system with spatially controllable partial...

Photocopying – Projection printing and copying cameras – Step and repeat
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