Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-08-15
2006-08-15
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000, C355S071000
Reexamination Certificate
active
07092070
ABSTRACT:
An illumination system having an array optical element with different illumination regions corresponding or matched to different line width variations printed on a photosensitive material. The array optical element may be a filter, diffractive optical element, or micro lens array having illumination regions producing different types of illumination properties or characteristics. Each of the illumination regions are matched or correspond to a respective region on a patterning device to provide optimized exposure of a photosensitive material. The optical element may be used to tailor a conventional illumination system to the unique characteristics of the projection optics used in a system, thereby compensating for vertical and horizontal bias or variations in line width for features oriented in the vertical and horizontal direction.
REFERENCES:
patent: 4621922 (1986-11-01), Tabarelli et al.
patent: 5184176 (1993-02-01), Unno et al.
patent: 5296892 (1994-03-01), Mori
patent: 5329336 (1994-07-01), Hirano et al.
patent: 5348837 (1994-09-01), Fukuda et al.
patent: 5357312 (1994-10-01), Tounai
patent: 5383000 (1995-01-01), Michaloski et al.
patent: 5446587 (1995-08-01), Kang et al.
patent: 5631721 (1997-05-01), Stanton et al.
patent: 5642183 (1997-06-01), Sugihara et al.
patent: 5657235 (1997-08-01), Liebmann et al.
patent: 5673103 (1997-09-01), Inoue et al.
patent: 5684566 (1997-11-01), Stanton
patent: 5714218 (1998-02-01), Nishio et al.
patent: 5726740 (1998-03-01), Shiozawa et al.
patent: 5801821 (1998-09-01), Borodovsky
patent: 5864381 (1999-01-01), Neal et al.
patent: 5895737 (1999-04-01), McCullough et al.
patent: 5946079 (1999-08-01), Borodovsky
patent: 6021009 (2000-02-01), Borodovsky et al.
patent: 6049374 (2000-04-01), Komatsuda et al.
patent: 6078380 (2000-06-01), Taniguchi et al.
patent: 6211944 (2001-04-01), Shiraishi
patent: 6245470 (2001-06-01), Kamon
patent: 6259513 (2001-07-01), Gallatin et al.
patent: 6292255 (2001-09-01), McCullough
patent: 6628370 (2003-09-01), McCullough et al.
patent: 0 486 316 (1992-05-01), None
patent: 0 564 264 (1993-10-01), None
patent: 07-094399 (1995-04-01), None
patent: 07-201723 (1995-08-01), None
patent: 7-201723 (1995-08-01), None
English-language Abstract of JP 07-094399, published Apr. 7, 1995, from http://www.19.ipdl.jpo.go.jp/PA1/result/detail/main/wAAAFzaOGtDa407094399P1.htm, 2 Pages (last visited Sep. 9, 2003).
English-language Abstract of JP 07-201723, published Aug. 4, 1995, from http://www.19.ipdl.jpo.go.jp/PA1/result/detail/main/wAAAxtailuDA407201823P1.htm, 2 Pages (last visited Sep. 9, 2003).
Copy of a Search Report from the European Patent Office for European Patent Application No. 01115009.1, mailed Dec. 23, 2004 (3 pages).
Notice To Submit Response (with English Translation), issued Jan. 18, 2005 in Korean Patent Application No. 10-1997-0062663, 4 pages.
Examination Report, issued in European Appl. No. 01115009.1, 6 pages, dated Jun. 10, 2005.
Gallatin Gregg M.
McCullough Andrew W.
ASML Holding N.V.
Mathews Alan
Sterne Kessler Goldstein & Fox P.L.L.C.
LandOfFree
Illumination system with spatially controllable partial... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Illumination system with spatially controllable partial..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Illumination system with spatially controllable partial... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3692434