4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Gregg A. Norris

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Ion beam current uniformity monitor, ion implanter and...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Ion beam implant current, spot width and position tuning

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Methods and apparatus for beam density measurement in two...

Radiant energy – With charged particle beam deflection or focussing – With detector
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Profile ID: LFUS-PAI-P-3143416

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