Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2007-03-29
2010-02-16
Souw, Bernard E (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S3960ML, C250S398000, C250S492230, C250S492300, C257SE21043
Reexamination Certificate
active
07663125
ABSTRACT:
An ion beam current uniformity monitor, ion implanter and related method are disclosed. In one embodiment, the ion beam current uniformity monitor includes an ion beam current measurer including a plurality of measuring devices for measuring a current of an ion beam at a plurality of locations; and a controller for maintaining ion beam current uniformity based on the ion beam current measurements by the ion beam current measurer.
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Callahan William G.
Evans Morgan D.
Gammel George M.
Hussey Norman E.
Norris Gregg A.
Souw Bernard E
Varian Semiconductor Equipment Associates Inc.
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