4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Gert-Jan Heerens

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Assembly of a reticle holder and a reticle

Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate

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Assembly of a reticle holder and a reticle

Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate

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Lithographic alignment system

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Lithographic apparatus and device manufacturing method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Lithographic apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2401376

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