Assembly of a reticle holder and a reticle

Details Assembly of a reticle holder and a reticle Assembly of a reticle holder and a reticle

2007-06-15

2010-11-23

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S072000

Reexamination Certificate

active

07839489

ABSTRACT:
A system for use in a lithographic apparatus includes an assembly of a reticle and a reticle holder. The reticle includes a marker. The system also includes a position detector arranged to detect the reticle marker to position the reticle with respect to the reticle holder, and a storage container constructed and arranged to store the assembly during the positioning of the reticle with respect to the reticle holder. The reticle holder and the detector are arranged to be kinematically aligned with respect to each other.

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