Assembly of a reticle holder and a reticle

Details Assembly of a reticle holder and a reticle Assembly of a reticle holder and a reticle

2007-06-26

2007-06-26

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S072000

Reexamination Certificate

active

10962751

ABSTRACT:
An assembly for use in a lithographic apparatus is disclosed. The assembly includes a reticle, and a reticle holder. The reticle holder is adjustable between a form closed reticle blocking state and a reticle releasing state. The reticle holder is arranged to (1) prevent movement of the reticle with respect to the reticle holder in at least one direction without friction when the reticle holder is in the form closed reticle blocking state, and (2) release the reticle when the reticle holder is in the reticle releasing state.

REFERENCES:
patent: 4443098 (1984-04-01), Walwyn et al.
patent: 5471279 (1995-11-01), Takizawa
patent: 5608773 (1997-03-01), Korenaga et al.
patent: 6216873 (2001-04-01), Fosnight et al.
patent: 6906783 (2005-06-01), del Puerto et al.
patent: 6931700 (2005-08-01), Uchiyama
patent: 2002/0066692 (2002-06-01), Smith et al.
patent: 0 284 003 (1988-09-01), None
patent: 0 522 865 (1997-09-01), None
patent: 0 923 000 (1999-06-01), None
patent: 0 923 000 (2000-12-01), None
patent: 1 341 042 (2003-09-01), None
patent: 1 341 042 (2004-03-01), None

Affiliated with

Also associated with

Rating

Assembly of a reticle holder and a reticle does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Assembly of a reticle holder and a reticle, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Assembly of a reticle holder and a reticle will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3842519