Single-crystal, oriented-crystal, and epitaxy growth processes;
Forming from vapor or gaseous state
With a step of measuring, testing, or sensing
Inventor
active
One hundred millimeter single crystal silicon carbide wafer
One hundred millimeter single crystal silicon carbide wafer
Reducing nitrogen content in silicon carbide crystals by...
Seeded single crystal silicon carbide growth and resulting...
Seeded single crystal silicon carbide growth and resulting...
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