Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
Inventor
active
Apparatus for asymmetrically contouring the thickness of sputter
Blocking shield and method for contouring the thickness of sputt
Clamp with wafer release for semiconductor wafer processing equi
Clamp with wafer release for semiconductor wafer processing equi
Deposition rate regulation by computer control of sputtering sys
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