4. Optical: systems and elements
  5. Compound lens system
  6. Microscope

Franz Cemic

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Autofocus module and method for a microscope-based system

Optical: systems and elements – Compound lens system – Microscope
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Critical dimension measuring instrument

Optics: measuring and testing – Dimension
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Device and method for inspecting an object

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Illumination device, and coordinate measuring instrument...

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
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Illumination device; and coordinate measuring instrument...

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
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Profile ID: LFUS-PAI-P-2808958

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