Critical dimension measuring instrument

Details Critical dimension measuring instrument Critical dimension measuring instrument

2005-09-13

2005-09-13

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Dimension

C359S621000

Reexamination Certificate

active

06943901

ABSTRACT:
A critical dimension measuring instrument includes a light source, a beam-shaping optical system, a condenser having a condenser pupil, a first microlens array arrangement, a first auxiliary optical element having positive refractive power, a second auxiliary optical element having positive refractive power, and a second microlens array arrangement. The first microlens array arrangement, the first auxiliary optical element, the second auxiliary optical element and the second microlens array arrangement are arranged in successive fashion between the beam-shaping optical system and the condenser.

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