4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Robot control

Frank E. Kretz

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Alignment of semiconductor wafers and other articles

Material or article handling – Associated with semiconductor wafer handling – Including wafer orienting means
Reexamination Certificate

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Alignment of semiconductor wafers and other articles

Material or article handling – Apparatus for charging a load holding or supporting element... – Device engages load handling or supporting element or load...
Reexamination Certificate

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Alignment of semiconductor wafers and other articles

Material or article handling – Process – Of reorienting article
Reexamination Certificate

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Article holders and article positioning methods

Material or article handling – Process
Reexamination Certificate

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Article holders with sensors detecting a type of article...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2634695

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