Alignment of semiconductor wafers and other articles

Details Alignment of semiconductor wafers and other articles Alignment of semiconductor wafers and other articles

2005-08-30

2005-08-30

Matecki, Kathy (Department: 3654)

Material or article handling

Associated with semiconductor wafer handling

Including wafer orienting means

C414S941000, C294S064200

Reexamination Certificate

active

06935830

ABSTRACT:
A wafer or some other article is aligned while being held by an end-effector.

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