Alignment of semiconductor wafers and other articles

Details Alignment of semiconductor wafers and other articles Alignment of semiconductor wafers and other articles

2005-09-27

2005-09-27

Matecki, Kathy (Department: 3651)

Material or article handling

Apparatus for charging a load holding or supporting element...

Device engages load handling or supporting element or load...

C414S783000, C414S900000, C294S064300

Reexamination Certificate

active

06948898

ABSTRACT:
A wafer or some other article is aligned while being held by an end-effector.

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