Alignment of semiconductor wafers and other articles

Details Alignment of semiconductor wafers and other articles Alignment of semiconductor wafers and other articles

2006-05-30

2006-05-30

Crawford, Gene O. (Department: 3651)

Material or article handling

Process

Of reorienting article

C414S222040, C414S783000, C414S936000, C294S064300

Reexamination Certificate

active

07052229

ABSTRACT:
A wafer or some other article is aligned while being held by an end-effector.

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