4. Semiconductor device manufacturing: process
  5. Formation of semiconductive active region on any substrate
  6. Amorphous semiconductor

Frank Cardone

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Abrupt “delta-like” doping in Si and SiGe...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
Reexamination Certificate

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Abrupt delta-like doping in Si and SiGe films by UHV-CVD

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate
Reexamination Certificate

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Semiconductor structure having an abrupt doping profile

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – With lattice constant mismatch
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2373785

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