4. Semiconductor device manufacturing: process
  5. With measuring or testing

Franciscus Bernardus Maria Van Bilsen

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Alignment measurement arrangement and alignment measurement...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Alignment strategy optimization method

Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate

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Alignment systems and methods for lithographic systems

Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate

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Alignment systems and methods for lithographic systems

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate

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Lithographic apparatus with multiple alignment arrangements...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1215164

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