4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Feng Q. Liu

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Barrier removal at low polish pressure

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Conductive polishing article for electrochemical mechanical...

Abrading – Flexible-member tool – per se
Reexamination Certificate

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Conductive polishing article for electrochemical mechanical...

Abrading – Flexible-member tool – per se
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Conductive polishing article for electrochemical mechanical...

Abrading – Abrading process
Reexamination Certificate

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Conductive polishing article for electrochemical mechanical...

Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2387173

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