Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate
2006-09-12
2006-09-12
Wilson, Lee D. (Department: 3723)
Abrading
Abrading process
Glass or stone abrading
C451S057000, C451S060000, C451S287000, C451S288000, C451S447000, C438S627000, C438S626000, C438S633000, C438S643000, C438S645000
Reexamination Certificate
active
07104869
ABSTRACT:
The invention generally provides methods and compositions for planarizing a substrate surface having underlying dielectric materials. Aspects of the invention provide compositions and methods using a combination of low polishing pressures, polishing compositions, various polishing speeds, selective polishing pads, and selective polishing temperatures, for removing barrier materials by a chemical mechanical polishing technique with minimal residues and minimal seam damage. Aspects of the invention are achieved by employing a strategic multi-step process including sequential CMP at low polishing pressure to remove the deposited barrier materials.
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Chen Liang-Yuh
Liu Feng Q.
Mavliev Rashid
Morad Ratson
Sun Lizhong
Applied Materials Inc.
McDonald Shantese L.
Patterson and Sheridan
Wilson Lee D.
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