4. Coating apparatus
  5. Gas or vapor deposition
  6. Crucible or evaporator structure

FEI Company

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Angular aperture shaped beam system and method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Apparatus and method for reducing differential sputter rates

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Apparatus for evacuating a sample

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
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Apparatus for tilting a beam system

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Apparatus with permanent magnetic lenses

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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