Apparatus for evacuating a sample

Details Apparatus for evacuating a sample Apparatus for evacuating a sample

2005-06-28

2008-11-25

Vanore, David A. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S306000, C250S307000, C250S442110

Reexamination Certificate

active

07456413

ABSTRACT:
The invention relates to an apparatus for evacuating samples. A sample4is hereby placed in a cavity3of a sheet1with a smooth surface2. A sole plate5Is placed upon this smooth surface2, whereby the smooth surface2and the sole plate5placed thereupon together form a vacuum seal. The sole plate5, upon which a vacuum column6is mounted, can be slid across the smooth surface2. By sliding the sole plate5over the cavity4, the cavity4is evacuated in several steps.In an embodiment of the invention, the vacuum column6takes the form of an ESEM (Environmental Scanning Electron Microscope). In this way, it is possible to inspect the evacuated sample4with the ESEM.

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patent: 2000-340153 (2000-12-01), None

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