Apparatus with permanent magnetic lenses

Details Apparatus with permanent magnetic lenses Apparatus with permanent magnetic lenses

2006-06-20

2006-06-20

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S309000, C250S311000, C250S3960ML

Reexamination Certificate

active

07064325

ABSTRACT:
The invention describes a particle-optical apparatus arranged to focus a beam (1) of electrically charged particles with the aid of two particle-optical lens systems (10, 20). The lens action is achieved by magnetic fields, which fields are generated by permanent-magnetic materials (13, 23). In contrast to magnetic lenses equipped with a coil, it is not easy in the case of lenses equipped with permanent-magnetic material to alter the focusing magnetic field with the aim of altering the optical power. In an apparatus according to the invention, the optical power of the lens systems is altered by altering the energy with which the beam (1) traverses the lens systems (10, 20). This can easily happen by altering the voltage of electrical power supplies (14, 24).

REFERENCES:
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patent: 5300776 (1994-04-01), Krivanek
patent: 6320194 (2001-11-01), Khursheed et al.
patent: 6515287 (2003-02-01), Notte, IV
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patent: 6891167 (2005-05-01), Notte, IV
patent: 2005/0236568 (2005-10-01), Buijsse et al.
patent: 2003-346697 (2003-12-01), None
A. Khursheed, N. Karuppiah, M. Osterberg, and J. T. L. Thong, “Add-On Transmission Attachments for the Scanning Electron Microscope,”2003 American Institute of Physics, Rev. Sci. Instrum., vol. 74, No. 1, Jan. 2003.

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