4. Active solid-state devices (e.g., transistors, solid-state diode
  5. With means to control surface effects
  6. Insulating coating

Fang-Wen Tsai

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Extreme low-k dielectric film scheme for advanced interconnect

Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
Reexamination Certificate

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Extreme low-K dielectric film scheme for advanced interconnects

Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
Reissue Patent

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Solution for FSG induced metal corrosion & metal...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2292274

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